Semiconductor makers: buy HFCs that are exempt from EU phase down

How to show that hydrofluorocarbons (HFCs) you buy will be used to make semiconductors, so they're excluded from the EU's HFC phase down.

This guidance was withdrawn on

This guidance is now part of Uses of HFCs exempt from the phase down.

The EU is cutting the availability of hydrofluorocarbons (HFCs), which are a type of fluorinated greenhouse gas (F gas), by 79% between 2015 and 2030.

HFCs used in the manufacture of semiconductors are excluded from the phase down, as long as you show that they’re for use in semiconductor manufacture.

Find out more about the HFC phase down or see a list of HFCs that are part of the phase down in section 1 of the list of F gases regulated by the EU.

Show that HFCs you buy are for use in semiconductors

Gases that you buy are only excluded from the phase down, if they’re in a container that has a label stating that the contents can only be used for either of the following:

  • etching of semiconductor material (eg plasma etching)
  • cleaning of chemical vapour decomposition chambers

Make sure your supplier reports your purchases to the EU, so they remain outside the phase down.

Prevent leaks

You’re legally required to take precautions to prevent leaks of any fluorinated greenhouse gas (F gas) regulated by the EU. F gases include HFCs, perfluorocarbons (PFCs) and other gases like sulphur hexaflouride (SF6).

Your precautions should be technically and economically feasible.

Contact the Environment Agency, if you’re not sure if you’re taking enough precautions.

Published 31 December 2014